Investigation of induced recrystallization and stress in close-spaced sublimated and radio-frequency magnetron sputtered CdTe thin films

被引:64
作者
Moutinho, HR [1 ]
Dhere, RG [1 ]
Al-Jassim, MM [1 ]
Levi, DH [1 ]
Kazmerski, LL [1 ]
机构
[1] Natl Renewable Energy Lab, Golden, CO 80401 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 04期
关键词
D O I
10.1116/1.581892
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have induced recrystallization of small grain CdTe thin films deposited at low temperatures by close-spaced sublimation (CSS), using a standard CdCl2 annealing treatment. We also studied the changes in the physical properties of CdTe films deposited by radio-frequency magnetron Sputtering after the same post-deposition processing. We demonstrated that the effects of CdCl2 on the physical properties of CdTe films are similar, and independent of the deposition. method. The recrystallization process is linked directly to the grain size and stress in the films. These studies indicated the feasibility of using lower-temperature processes in fabricating efficient CSS CdTe solar cells. We believe that, after the optimization of the parameters of the chemical treatment, these films can attain a quality similar to CSS films grown using current standard conditions. (C) 1999 American Vacuum Society.
引用
收藏
页码:1793 / 1798
页数:6
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