Surface modification of yttria-stabilized-zirconia thin films under various oxygen partial pressures

被引：10

作者：

Bae, J. S. ^{[2
]}

Park, S. -S. ^{[1
]}

Mun, B. S. ^{[3
]}

Park, S. H. ^{[1
]}

Hwang, E. S. ^{[1
]}

Kim, J. ^{[4
]}

Huh, J. ^{[5
]}

Park, H. J. ^{[6
]}

Kim, J. S. ^{[6
]}

Yun, H. J. ^{[7
]}

Kim, H. G. ^{[2
]}

Jeong, S. Y. ^{[8
]}

Hwang, J. ^{[1
,9
]}

Park, S. ^{[1
]}

机构：

[1] Pusan Natl Univ, Dept Phys, Pusan 609735, South Korea

[2] Korea Basic Sci Inst, Busan Ctr, Pusan 609735, South Korea

[3] Hanyang Univ, Dept Appl Phys, ERICA, Ansan 426791, South Korea

[4] Gwangju Inst Sci & Technol, Natl Core Res Ctr Extreme Light Applicat, Kwangju 500712, South Korea

[5] Chonnam Natl Univ, Yeosu 550749, South Korea

[6] Pusan Natl Univ, Res Ctr Dielect & Adv Matter, Pusan 609735, South Korea

[7] Korea Basic Sci Inst, Jeunju Ctr, Jeonju 561756, South Korea

[8] Pusan Natl Univ, Dept Cognomechatron Engn, Miryang 627706, South Korea

[9] Sungkyunkwan Univ, Dept Phys, Suwon 440746, Gyeonggi Do, South Korea

来源：

THIN SOLID FILMS | 2012年 / 520卷 / 17期

基金：

新加坡国家研究基金会;

关键词：

Oxide thin films; X-ray diffraction; Spectroscopy; Surface structure; Optical band-gap; OPTICAL-PROPERTIES; ELECTRONIC-STRUCTURE; OXIDE; CONDUCTIVITY; GROWTH; DEPOSITION; Y2O3;

D O I：

10.1016/j.tsf.2012.02.049

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This report discusses the structural and spectroscopic analysis of yttria-stabilized-zirconia (YSZ) thin films grown on Al2O3(0001) substrates. It is found that the changes of oxygen partial pressure during the growth are closely related to the surface chemical compositions and the surface crystal orientations of the thin films. The presence of oxygen partial pressure produces a polycrystalline structure on the thin film while a preferred orientation of crystal structures is formed under no oxygen partial pressure. Difficulty arises in identifying the structure of the thin films due to the broad characteristics of the x-ray diffraction (XRD) peaks; however, the XRD rocking scan suggests the existence of two lateral domain sizes. The chemical analysis of the thin films from x-ray photoelectron spectroscopy measurements indicates the enrichment of surface yttrium-oxide as the oxygen partial pressure increases. The detailed analysis of valence band spectra also suggests that the thin films undergo a surface structural phase transition, i.e., transforming from a single tetragonal structure to a mixed (cubic + monoclinic) structure. Furthermore, the optical data display the small increments of the band gap as the oxygen partial pressure increases, which reflects the presence of the structural phase transition of the thin films. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：5826 / 5831

页数：6

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