Electrically tuneable NIR-spectrometer

The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this MR-spectrometer is an electrically tuneable silicon surface micromachined Fabry-Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient (TCE) close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.