Asymmetric structure-induced hot-electron injection under hot-carrier stress in a-InGaZnO thin film transistor

被引:18
作者
Tsai, Ming-Yen [1 ]
Chang, Ting-Chang [2 ,3 ]
Chu, Ann-Kuo [1 ]
Chen, Te-Chih [2 ]
Hsieh, Tien-Yu [2 ]
Lin, Kun-Yao [2 ]
Tsai, Wu-Wei [4 ]
Chiang, Wen-Jen [4 ]
Yan, Jing-Yi [4 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Photon, Kaohsiung 80424, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[3] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan
[4] Ind Technol Res Inst, Hsinchu 31040, Taiwan
关键词
D O I
10.1063/1.4824329
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter investigates the degradation behavior under hot-carrier stress in InGaZnO thin film transistors with I- and U-shaped asymmetric electrodes. After hot-carrier stress, a serious V-t shift, as well as on-current and subthreshold swing degradations are observed in I-d-V-g transfer curve under reverse mode. Moreover, it is found that the V-t instability is caused by hot-electron injection near the drain side, and this phenomenon which is verified by C-V measurement. Furthermore, the location of trapped hot-electron is estimated from the two-stage rise in the gate-to-drain/gate-to-source capacitance curves and then verified by the simulation tool. (C) 2013 AIP Publishing LLC.
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页数:4
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