Argon ionization cross sections for charge state distribution modeling in electron cyclotron resonance ion source

被引:5
作者
Bogatu, IN [1 ]
Edgell, DH
Kim, JS
Pardo, RC
Vondrasek, R
机构
[1] FARTECH Inc, San Diego, CA 92121 USA
[2] Argonne Natl Lab, Argonne, IL 60439 USA
关键词
D O I
10.1063/1.1427030
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An updated and more accurate database for single- and double-ionization cross sections for almost all argon ions has been developed for the modeling of the charge state distribution (CSD) within an electron cyclotron resonance ion source. When the highly non-Maxwellian anisotropic electron-distribution function, is modeled by a Fokker-Planck code, one has to use the ionization cross sections instead of the Maxwellian rate coefficients. Most of the fitting coefficients used within the well-established semi-empirical formulas for direct ionization and double ionization have been recalculated using more accurate crossed-beam experimental data available. The shift of the CSD to higher-charge states due to the contribution of excitation autoionization and double ionization is presented by comparing the GEM code modeling using the Lotz formula and the cross sections with updated fitting coefficients. (C) 2002 American Institute of Physics.
引用
收藏
页码:638 / 640
页数:3
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