Time-delayed, time-resolved Langmuir probe diagnostics of pulsed plasmas

被引：4
|
作者：
Qin, S [1 ]
McTeer, A [1 ]
机构：
[1] Micron Technol Inc, Boise, ID 83707 USA
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 24期
关键词：
D O I：
10.1063/1.2146209
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A method called time-delayed, time-resolved Langmuir probe measurement is used to measure pulsed plasmas to overcome the secondary electron emission during high-voltage pulses. The plasma densities of the pulsed-mode plasma or any plasmas with secondary electron issues can be measured and analyzed by using this method. (c) 2005 American Institute of Physics.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
  • [1] Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses
    Qin, Shu
    McTeer, Allen
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (15): : 6508 - 6515
  • [2] Improvements to the floating double probe for time-resolved measurements in pulsed rf plasmas
    Smith, Brian A.
    Overzet, Lawrence J.
    Review of Scientific Instruments, 1998, 69 (03):
  • [3] Improvements to floating double probe for time-resolved measurements in pulsed rf plasmas
    Smith, BA
    Overzet, LJ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (03): : 1372 - 1377
  • [4] A time-resolved Langmuir double-probe method for the investigation of pulsed magnetron discharges
    Welzel, T
    Dunger, T
    Kupfer, H
    Richter, F
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (12) : 6994 - 7001
  • [5] A time-resolved Langmuir double-probe method for the investigation of pulsed magnetron discharges
    Welzel, Th. (t.welzel@physik.tu-chemnitz.de), 1600, American Institute of Physics Inc. (96):
  • [6] Time-resolved investigations of pulsed microwave excited plasmas
    Behle, S
    Brockhaus, A
    Engemann, J
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2000, 9 (01): : 57 - 67
  • [7] Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
    Hippler, Rainer
    Cada, Martin
    Hubicka, Zdenek
    APPLIED PHYSICS LETTERS, 2020, 116 (06)
  • [8] Time-resolved Langmuir probe measurements in preionised HiPIMS discharge
    Poolcharuansin, P.
    Bradley, J. W.
    Kelly, P. J.
    MATERIALS TECHNOLOGY, 2011, 26 (01) : 25 - 27
  • [9] TIME-RESOLVED OPTICAL DIAGNOSTICS OF RADIO-FREQUENCY PLASMAS
    GOTTSCHO, RA
    MANDICH, ML
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 617 - 624
  • [10] Optical Time-Resolved Diagnostics of Laser-Produced Plasmas
    D. Batani
    J. Santos
    P. Forestier-Colleoni
    D. Mancelli
    M. Ehret
    J. Trela
    A. Morace
    K. Jakubowska
    L. Antonelli
    D. del Sorbo
    M. Manclossi
    M. Veltcheva
    Journal of Fusion Energy, 2019, 38 : 299 - 314
12345