Time-delayed, time-resolved Langmuir probe diagnostics of pulsed plasmas

被引：4
|
作者：
Qin, S [1 ]
McTeer, A [1 ]
机构：
[1] Micron Technol Inc, Boise, ID 83707 USA
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 24期
关键词：
D O I：
10.1063/1.2146209
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A method called time-delayed, time-resolved Langmuir probe measurement is used to measure pulsed plasmas to overcome the secondary electron emission during high-voltage pulses. The plasma densities of the pulsed-mode plasma or any plasmas with secondary electron issues can be measured and analyzed by using this method. (c) 2005 American Institute of Physics.
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页码：1 / 3
页数：3
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