Technological principles of motion parameter transducers based on mass and charge transport in electrochemical microsystems

被引：52

作者：

Krishtop, V. G. ^{[1
,2
]}

Agafonov, V. M. ^{[1
]}

Bugaev, A. S. ^{[3
]}

机构：

[1] State Univ, Moscow Inst Phys & Technol, Dept Phys & Quantum Elect, Dolgoprudnyi, Moscow Oblast, Russia

[2] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Oblast, Russia

[3] Russian Acad Sci, Kotelnikov Inst Radioengn & Elect, Moscow, Russia

来源：

RUSSIAN JOURNAL OF ELECTROCHEMISTRY | 2012年 / 48卷 / 07期

关键词：

electrochemical transducer; electrochemical cell; molecular-electronic transport; solid-liquid microsystems; convective diffusion; FREQUENCY; DIFFUSION;

D O I：

10.1134/S1023193512070038

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The most important advantage of motion parameter transducers based on mass and charge transport in electrochemical systems is exceptionally high rate of mechanical signal conversion to electric current. Devices of this class are based on the principle of diffusion charge transport under the conditions of forced convection appearing as a result of external acceleration. This work shows the possibility of development of modern high-technology devices based on an electrochemical transducer developed using up-to-date microelectronic technologies.

引用

页码：746 / 755

页数：10

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