CW-laser induced modification in glasses by laser backside irradiation (LBI)

被引:0
作者
Yoshioka, M. [1 ]
Hidai, H. [1 ]
Tokura, H. [1 ]
机构
[1] Tokyo Inst Technol, Dept Mech Sci & Engn, Meguro Ku, 2-12-1 Ookayama, Tokyo 1528552, Japan
来源
PHOTON PROCESSING IN MICROELECTRONIC AND PHOTONICS V | 2006年 / 6106卷
关键词
Laser Backside Irradiation (LBI); CW laser; modification; glass; micro fabrication;
D O I
10.1117/12.645829
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe modification of various glasses by a CW Laser Backside Irradiation (CW-LBI) method. In this method, an absorbent which was attached on one side of a glass sheet, was irradiated from the other side through the glass with CW laser beam. Ar ion laser was used and copper foil was chosen as an absorbent. Silica, Pyrex and soda-lime glasses were tested as sample glasses. When the absorbent was irradiated, heated spot appeared in the glass adjacent to the absorbent and it ran to the other side of the glass in the path of laser beam. Then cylindrical modified zone that was transparent and crack-free was produced. Diameter of the modified Column was 30 similar to 100 mu m and the cylinder Could grow Lip to 30 mm. The growth rate was approximately 200 mm/s. The dimension of modified zone depended on irradiation conditions, such as laser fluence or beam profiles. The threshold fluences for modification of the glasses were 1-2.5 x 10(5) W/cm(2). Then the characteristics of modified zone were examined by etching in 5 wt. % HIF solution. As a result, it turned out that modified zone consisted of two layers and etching rate of the inner part was lower than that of the outer part. The Raman spectroscopy revealed that the density of the inner part increased by the modification.
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页数:9
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