Wafer-bonded single-crystal silicon slot waveguides and ring resonators

被引：16

作者：

Briggs, Ryan M. ^{[1
]}

Shearn, Michael ^{[1
]}

Scherer, Axel ^{[1
]}

Atwater, Harry A. ^{[1
]}

机构：

[1] CALTECH, Thomas J Watson Lab Appl Phys, Pasadena, CA 91125 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 94卷 / 02期

关键词：

diffraction gratings; elemental semiconductors; integrated optics; optical losses; optical resonators; optical waveguides; Q-factor; silicon; silicon compounds; silicon-on-insulator; CONFINING LIGHT;

D O I：

10.1063/1.3070541

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We fabricated horizontal Si slot waveguides with a 25 nm SiO(2) slot layer by bonding thin Si-on-insulator wafers. After removing the Si substrate and buried oxide from one side of the bonded structure, grating-coupled waveguides and ring resonators were partially etched into the Si/SiO(2)/Si device layers. The gratings exhibit efficiencies of up to 23% at 1550 nm and the ring resonators were measured to have loaded quality factors near 42 000 for the lowest-order transverse-electric mode, corresponding to a propagation loss of 15 dB/cm. The leaky lowest-order transverse-magnetic mode was also observed with a propagation loss of 44 dB/cm.

引用

页数：3

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