Influence of surface roughness on the electrical conductivity of semiconducting thin films

被引：36

作者：

Ketenoglu, D. ^{[1
]}

Unal, B. ^{[1
]}

机构：

[1] Ankara Univ, Dept Engn Phys, TR-06100 Ankara, Turkey

来源：

PHYSICA A-STATISTICAL MECHANICS AND ITS APPLICATIONS | 2013年 / 392卷 / 14期

关键词：

Roughness scattering; Boltzmann transport equation; Semiconducting thin film; Conductivity; INTERFACE-ROUGHNESS; METALLIC-FILMS; GRAIN-BOUNDARY; TRANSPORT; RESISTIVITY; SCATTERING; MOBILITY; TEMPERATURE; CROSSOVER; EQUATION;

D O I：

10.1016/j.physa.2013.03.007

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The Green function solution of the Boltzmann transport equation has been applied in case of no magnetic field by ignoring any volume impurities. Gaussian, exponential and power law models for the surface roughness correlation function have been studied and the results have been compared with the ones obtained by other methods. It has been found that the electrical conductivity a increases with increasing correlation length I for the first two models, while for the third model a value is of the same order as the first two models. Therefore we show that the shape of the surface roughness can strongly influence the electrical properties. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：3008 / 3017

页数：10

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