共 29 条
[9]
Zinc oxide-based transparent conductive oxide films prepared by pulsed magnetron sputtering from powder targets: Process features and film properties
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2006, 24 (05)
:1782-1789
[10]
Kim H., 2002, THIN SOLID FILMS, p[420, 539]