Design of Step-Index Optical Waveguides by Ion Implantation

被引：14

作者：

Ramirez-Espinoza, C. ^{[1
]}

Salazar, D. ^{[1
]}

Rangel-Rojo, R. ^{[1
]}

Angel-Valenzuela, J. L. ^{[1
]}

Vazquez, G. V. ^{[2
]}

Flores-Romero, E. ^{[3
]}

Rodriguez-Fernandez, L. ^{[3
]}

Oliver, A. ^{[3
]}

Dominguez, D. A. ^{[4
]}

Marquez, H. ^{[1
]}

机构：

[1] Ctr Invest Cient & Educ Super Ensenada, Ensenada 22860, Baja California, Mexico

[2] Ctr Invest Opt, Guanajuato 37150, Mexico

[3] Univ Nacl Autonoma Mexico, Inst Fis, Puebla 72570, Mexico

[4] Univ Nacl Autonoma Mexico, Ctr Nanociencias & Nanotecnol, Ensenada 22860, Baja California, Mexico

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2015年 / 33卷 / 14期

关键词：

Fused silica; ion implantation; optical waveguide; REFRACTIVE-INDEX; SILICATE-GLASSES; SIO2;

D O I：

10.1109/JLT.2015.2422684

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Step-index optical waveguides have been obtained by means of silver ion implantation on fused silica substrates. Step index profiles have been reached using a sequential multiple ion implantation process with energies of implantation from 4.3 to 9MeV and fluences of 10(14)-10(15) ions/cm(2). Optical absorption spectra, propagation losses, intensity distribution, and effective refractive indices of the propagation modes of the waveguides are presented. An approach of refractive index profile of ion-implanted waveguides was fitted as function of polarizability, compaction, and stress.

引用

页码：3052 / 3059

页数：8

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