Design of Step-Index Optical Waveguides by Ion Implantation

被引:14
|
作者
Ramirez-Espinoza, C. [1 ]
Salazar, D. [1 ]
Rangel-Rojo, R. [1 ]
Angel-Valenzuela, J. L. [1 ]
Vazquez, G. V. [2 ]
Flores-Romero, E. [3 ]
Rodriguez-Fernandez, L. [3 ]
Oliver, A. [3 ]
Dominguez, D. A. [4 ]
Marquez, H. [1 ]
机构
[1] Ctr Invest Cient & Educ Super Ensenada, Ensenada 22860, Baja California, Mexico
[2] Ctr Invest Opt, Guanajuato 37150, Mexico
[3] Univ Nacl Autonoma Mexico, Inst Fis, Puebla 72570, Mexico
[4] Univ Nacl Autonoma Mexico, Ctr Nanociencias & Nanotecnol, Ensenada 22860, Baja California, Mexico
关键词
Fused silica; ion implantation; optical waveguide; REFRACTIVE-INDEX; SILICATE-GLASSES; SIO2;
D O I
10.1109/JLT.2015.2422684
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Step-index optical waveguides have been obtained by means of silver ion implantation on fused silica substrates. Step index profiles have been reached using a sequential multiple ion implantation process with energies of implantation from 4.3 to 9MeV and fluences of 10(14)-10(15) ions/cm(2). Optical absorption spectra, propagation losses, intensity distribution, and effective refractive indices of the propagation modes of the waveguides are presented. An approach of refractive index profile of ion-implanted waveguides was fitted as function of polarizability, compaction, and stress.
引用
收藏
页码:3052 / 3059
页数:8
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