Study on MEMS Microgripper Integrated Vacuum Tool

被引：0
|
作者：
Chen, Tao [1 ]
Chen, Liguo [1 ]
Pan, Mingqiang [1 ]
Sun, Lining [1 ]
机构：
[1] Soochow Univ, Robot & Microsyst Ctr, Suzhou 215021, Peoples R China
来源：
ADVANCES IN MECHATRONICS TECHNOLOGY | 2011年 / 43卷
关键词：
Microgripper; electrostatic comb drive; vacuum tool; ELECTROSTATICALLY DRIVEN MICROGRIPPER; MANIPULATION; DESIGN;
D O I：
10.4028/www.scientific.net/AMM.43.471
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a hybrid type of microelectromechanical systems (MEMS) microgripper integrated with an electrostatic mechanism and vacuum technology. Vacuum tools are integrated in this microgripper in order to achieve a reliable and accurate manipulation of microobjects. The microgripper is fabricated by a surface and bulk micromachining technology. The pick and release micromanipulation of microobjects is accomplished by electrostatic driving force caused by comb structure and an auxiliary air pressure force from air pump. The performance of this new hybrid type of microgripper is experimentally demonstrated through the manipulation of 100-200 mu m polystyrene balls. Experimental results show that this microgripper can successfully fulfill the pick and release micromanipulation.
引用
收藏
页码：471 / 475
页数：5
相关论文
共 50 条
  • [41] Advanced integrated solution for MEMS design
    Liateni, K
    Moulinier, D
    Affour, B
    Boutamine, H
    Karam, JM
    Veychard, D
    Courtois, B
    Cao, A
    DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 161 - 170
  • [42] The Effects of Cold Arm Width and Metal Deposition on the Performance of a U-Beam Electrothermal MEMS Microgripper for Biomedical Applications
    Cauchi, Marija
    Grech, Ivan
    Mallia, Bertram
    Mollicone, Pierluigi
    Sammut, Nicholas
    MICROMACHINES, 2019, 10 (03):
  • [43] Integrated Magnetic MEMS Relays: Status of the Technology
    Schiavone, Giuseppe
    Desmulliez, Marc P. Y.
    Walton, Anthony J.
    MICROMACHINES, 2014, 5 (03) : 622 - 653
  • [44] Vacuum tool for handling microobjects with a nanorobot
    Zesch, W
    Brunner, M
    Weber, A
    1997 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION - PROCEEDINGS, VOLS 1-4, 1997, : 1761 - 1766
  • [45] Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor
    Bazaz, Shafaat Ahmed
    Khan, Fahimullah
    Shakoor, Rana Iqtidar
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 167 (01) : 44 - 53
  • [46] Enabling intuitive and effective micromanipulation: A wearable exoskeleton-integrated macro-to-micro teleoperation system with a 3D electrothermal microgripper
    Si, Guoning
    Zhang, Hanli
    Zhang, Zhuo
    Zhang, Xuping
    ROBOTICS AND AUTONOMOUS SYSTEMS, 2024, 181
  • [47] Design of a Four-arm Structure MEMS Gripper Integrated with Sidewall Force Sensor
    Chen, Tan
    Chen, Liguo
    Liu, Baixu
    Wang, Jiachou
    Li, Xinxin
    2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 75 - +
  • [48] A novel piezoelectric-actuated microgripper simultaneously integrated microassembly force, gripping force and jaw-displacement sensors: design, simulation and experimental investigation
    Wang, Kan
    Wang, Dai-Hua
    Zhao, Jian-Yu
    Hou, Song
    SMART MATERIALS AND STRUCTURES, 2022, 31 (01)
  • [49] A MEMS capacitive vacuum pressure sensor featuring dual sealed cavities
    Li, Gang
    Xu, Tao
    Zhang, Huzhong
    Xi, Zhenhua
    Tao, Wenze
    Jia, Wenjie
    He, Deyan
    Han, Xiaodong
    VACUUM, 2025, 238
  • [50] Consideration of Thermo-Vacuum Stability of a MEMS Gyroscope for Space Applications
    Liu, Jili
    Fu, Mingrui
    Meng, Chao
    Li, Jianpeng
    Li, Kai
    Hu, Jun
    Chen, Xiaojuan
    SENSORS, 2020, 20 (24) : 1 - 12
12345