Study on MEMS Microgripper Integrated Vacuum Tool

被引：0
|
作者：
Chen, Tao [1 ]
Chen, Liguo [1 ]
Pan, Mingqiang [1 ]
Sun, Lining [1 ]
机构：
[1] Soochow Univ, Robot & Microsyst Ctr, Suzhou 215021, Peoples R China
来源：
ADVANCES IN MECHATRONICS TECHNOLOGY | 2011年 / 43卷
关键词：
Microgripper; electrostatic comb drive; vacuum tool; ELECTROSTATICALLY DRIVEN MICROGRIPPER; MANIPULATION; DESIGN;
D O I：
10.4028/www.scientific.net/AMM.43.471
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a hybrid type of microelectromechanical systems (MEMS) microgripper integrated with an electrostatic mechanism and vacuum technology. Vacuum tools are integrated in this microgripper in order to achieve a reliable and accurate manipulation of microobjects. The microgripper is fabricated by a surface and bulk micromachining technology. The pick and release micromanipulation of microobjects is accomplished by electrostatic driving force caused by comb structure and an auxiliary air pressure force from air pump. The performance of this new hybrid type of microgripper is experimentally demonstrated through the manipulation of 100-200 mu m polystyrene balls. Experimental results show that this microgripper can successfully fulfill the pick and release micromanipulation.
引用
收藏
页码：471 / 475
页数：5
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