Effect of Cooling Mode on Anodic Bonding Properties of Solid Polymer Electrolytes

被引:9
作者
Du, Chao [1 ]
Liu, Cui-rong [1 ]
Yin, Xu [1 ]
机构
[1] Tai Yuan Univ Sci & Technol, Taiyuan 030024, Shanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Cooling rate; Polymer electrolyte; Anodic bonding; MEMS encapsulation; GLASS; PEO; CONDUCTIVITY; DIFFUSION; COMPLEXES; SIO2;
D O I
10.1007/s10904-017-0658-x
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
In this study, a solid polymer electrolyte was prepared via mechanized alloying and hot pressing, and the final product was obtained through different cooling modes. The effects of different cooling modes on the bonding properties of the composites system were studied via AC impedance, DTA, XRD, and anodic bonding experiments. The crystallinity of the composites decreased, the glass transition temperature decreased, the amorphous region increased, and the ionic conductivity increased with increasing cooling rate. At the same time, the composites of rapid cooling treatment (cooled in ice water), the peak current during the bonding process, and both thickness and the tensile strength of the bonding layer increased significantly. Therefore, improving the cooling rate of the composites also improved the bonding properties of the composites to a certain extent. This study extends the application of solid polymer electrolytes as encapsulating materials in anode bonding.
引用
收藏
页码:146 / 151
页数:6
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