A smart accurate pressure-transducer for high-temperature applications

被引:0
|
作者
de Jong, PC [1 ]
Meijer, GCM [1 ]
机构
[1] Delft Univ Technol, Fac Elect Engn, Elect Res Lab, NL-2628 CD Delft, Netherlands
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes a high-temperature pressure-transducer interface for resistive Wheatstone bridges. The long-term drift of the smart sensor, i.e., the (pressure) sensor plus its interface electronics, will be determined by the drift of the sensor element only. A three-signal auto-calibration sequence of the interface electronics keeps the transducer interface virtually free of long-term drift. A novel low-drift pre-amplifier forms an essential element in this system. The high-temperature operation of the transducer interface has been investigated from both an electronic and a packaging point of view. The system has been realized by combining CMOS ASICs with a thick-film packaging technology. The pressure-transducer interface works up to 250 - 275 degrees C with 15-16 bits accuracy.
引用
收藏
页码:309 / 314
页数:6
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