The effect of a combined low-pressure gas discharge on metal surfaces

被引：7

作者：

Brzhozovskii, B. ^{[1
]}

Brovkova, M. ^{[1
]}

Gestrin, S. ^{[1
,2
]}

Martynov, V. ^{[1
]}

Zinina, E. ^{[1
]}

机构：

[1] Yuri Gagarin State Tech Univ, Saratov 410054, Russia

[2] Saratov State Vavilov Agrarian Univ, Saratov 410012, Russia

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2018年 / 51卷 / 14期

基金：

俄罗斯科学基金会;

关键词：

combined gas discharge; estimates of physical parameters; metal surface; impact; nanocomposite structure; OXIDE THIN-FILMS; CAPACITIVE DISCHARGES; RF; DEPOSITION; DRIVEN;

D O I：

10.1088/1361-6463/aab282

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The properties and effects of a combined gas discharge, obtained by superimposing ultrahigh-frequency electromagnetic and electrostatic fields on the surface of metal products, have been studied. Estimates for the main physical properties characterizing the discharge have been obtained. The paper shows that the properties of a combined discharge essentially depend on the sign of the constant electric potential of the workpiece. In the case of a positive potential, there is a substantial hardening of the metal surface layer. Blanket coating formation, which is a nanocomposite two-phase structure, has been recorded.

引用

页数：10

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