Adsorption and incorporation of silicon at GaN(0001) surfaces

被引:57
作者
Rosa, AL
Neugebauer, J
Northrup, JE
Lee, CD
Feenstra, RM
机构
[1] Max Planck Gesell, Fritz Haber Inst, D-14195 Berlin, Germany
[2] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA
[3] Carnegie Mellon Univ, Dept Phys, Pittsburgh, PA 15213 USA
关键词
D O I
10.1063/1.1452785
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the adsorption and incorporation of Si at GaN(0001) surfaces employing density-functional theory and scanning tunneling microscopy (STM). Calculating the surface energy of a large number of structures with various Si concentrations and various III-V ratios, we derive a phase diagram showing the energetically most stable surfaces as a function of the Si and N chemical potentials. Based on these results, we identify the surface reconstructions seen in STM, explain the incorporation mechanism of Si on GaN surfaces, and discuss under which conditions Si acts as an antisurfactant. (C) 2002 American Institute of Physics.
引用
收藏
页码:2008 / 2010
页数:3
相关论文
共 12 条
[1]   Structural and optical properties of Si-doped GaN [J].
Cremades, A ;
Görgens, L ;
Ambacher, O ;
Stutzmann, M ;
Scholz, F .
PHYSICAL REVIEW B, 2000, 61 (04) :2812-2818
[2]  
Gotz W, 1996, APPL PHYS LETT, V68, P3144, DOI 10.1063/1.115805
[3]   Growth of high-quality GaN by low-pressure metal-organic vapour phase epitaxy (LP-MOVPE) from 3D islands and lateral overgrowth [J].
Lahrèche, H ;
Vennéguès, P ;
Beaumont, B ;
Gibart, P .
JOURNAL OF CRYSTAL GROWTH, 1999, 205 (03) :245-252
[4]   Silicon on GaN(0001) and (000(1)over-bar) surfaces [J].
Lee, CD ;
Feenstra, RM ;
Rosa, AL ;
Neugebauer, J ;
Northrup, JE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (04) :1619-1625
[5]   Layer-by-layer growth of GaN induced by silicon [J].
Munkholm, A ;
Thompson, C ;
Murty, MVR ;
Eastman, JA ;
Auciello, O ;
Stephenson, GB ;
Fini, P ;
DenBaars, SP ;
Speck, JS .
APPLIED PHYSICS LETTERS, 2000, 77 (11) :1626-1628
[6]  
Neugebauer J, 1996, FESTKOR A S, V35, P25
[7]   Structure of GaN(0001): The laterally contracted Ga bilayer model [J].
Northrup, JE ;
Neugebauer, J ;
Feenstra, RM ;
Smith, AR .
PHYSICAL REVIEW B, 2000, 61 (15) :9932-9935
[8]   Inversion of wurtzite GaN(0001) by exposure to magnesium [J].
Ramachandran, V ;
Feenstra, RM ;
Sarney, WL ;
Salamanca-Riba, L ;
Northrup, JE ;
Romano, LT ;
Greve, DW .
APPLIED PHYSICS LETTERS, 1999, 75 (06) :808-810
[9]   Effect of Si doping on strain, cracking, and microstructure in GaN thin films grown by metalorganic chemical vapor deposition [J].
Romano, LT ;
Van de Walle, CG ;
Ager, JW ;
Götz, W ;
Kern, RS .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (11) :7745-7752
[10]   The formation of GaN dots on AlxGa1-xN surfaces using Si in gas-source molecular beam epitaxy [J].
Shen, XQ ;
Tanaka, S ;
Iwai, S ;
Aoyagi, Y .
APPLIED PHYSICS LETTERS, 1998, 72 (03) :344-346