High-sensitivity humidity sensors with ZnO nanorods based two-port surface acoustic wave delay line

被引：61

作者：

Hong, Hoang-Si ^{[1
]}

Phan, Duy-Thach ^{[1
]}

Chung, Gwiy-Sang ^{[1
]}

机构：

[1] Univ Ulsan, Sch Elect Engn, Ulsan 680749, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2012年 / 171卷

关键词：

Nanorod ZnO; AlN thin film; SAW humidity sensor; NANOWIRE; GROWTH; ARRAYS; AIN;

D O I：

10.1016/j.snb.2012.06.026

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper describes the fabrication and characterization of zinc oxide (ZnO) nanorods based surface acoustic wave (SAW) humidity sensors. In this work, the ZnO nanorods were synthesized and coated on nanocrystalline ZnO/AlN/Si-layered structures. SAW properties (e.g., resonance frequency) over a relative humidity (RH) ranged from 10% to 90% at 25 degrees C were investigated. The surface morphologies of these SAW structures (AlN/Si, nanocrystalline ZnO/AlN/Si and ZnO nanorods/nanocrystalline ZnO/AlN/Si) were also evaluated. Experimental results showed that the performance of SAW structures was slightly inferior compared with that of nanocrystalline ZnO/AlN/Si-layered structures. However, the sensor deposited ZnO nanorods showed the largest resonance frequency shift of approximately 750 kHz due to the high surface-to-volume ratio of the ZnO nanorod sensing layer. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：1283 / 1287

页数：5

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