Vertical comb-drive MEMS mirror with sensing function for phase-shift device

被引：13

作者：

Oda, Kentaro ^{[1
]}

Takao, Hidekuni ^{[1
]}

Terao, Kyohei ^{[1
]}

Suzuki, Takaaki ^{[1
]}

Shimokawa, Fusao ^{[1
]}

Ishimaru, Ichirou ^{[1
]}

Ohira, Fumikazu ^{[1
]}

机构：

[1] Kagawa Univ, Dept Intelligent Mech Syst Engn, Takamatsu, Kagawa 7610396, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 181卷

关键词：

MEMS mirror; Vertical comb-drive actuator; Capacitance sensor; Phase shift;

D O I：

10.1016/j.sna.2012.04.007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We aim to develop a MEMS mirror fabricated by micro-fabrication technology to realize a phase-shift device, which is a key component of a two-dimensional Fourier spectrometer. This MEMS mirror is capable of high-precision movement in the vertical direction parallel to the reference plane. In this study, a vertical electrostatic comb-drive actuator and capacitance sensor were fabricated monolithically on a single chip, and then four of them were mounted around the movable mirror. We fabricated a MEMS mirror that was able to move in the vertical direction while sensing the tilting angle. As a result, it would be feasible to use this vertical comb-drive MEMS mirror with a sensing function for a phase-shift device that was able to control the vertical displacement and the tilting angle of a movable mirror. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：61 / 69

页数：9

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