Simulation of the thin-film thickness distribution for an OLED thermal evaporation process

被引:28
|
作者
Lee, Eungki [1 ]
机构
[1] Kongju Natl Univ, Div Mech & Automot Engn, Cheonan, Chungnam, South Korea
关键词
OLED (organic light-emitting device); Vacuum thermal evaporation; Thin film; Thickness; Uniformity; LAYER; UNIFORMITY;
D O I
10.1016/j.vacuum.2008.08.007
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A design of an OLED (organic light-emitting device) fabrication system strongly depends on a thermal evaporation process. In an OLED evaporation process, the essential requirements include good uniformity of the film thickness over a glass substrate. In this paper, a process simulation model was developed to predict the film thickness distribution by understanding system design parameters that affect the uniformity of film thickness. Based on the method developed in this study, the uniformity of the thickness in an organic layer was successfully controlled. The developed method allowed the manufacture of high quality OLED displays. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:848 / 852
页数:5
相关论文
共 50 条
  • [21] Thermal distribution in amorphous InSnZnO thin-film transistor
    Urakawa, Satoshi
    Tomai, Shigekazu
    Ueoka, Yoshihiro
    Yamazaki, Haruka
    Kasami, Masashi
    Yano, Koki
    Wang, Dapeng
    Furuta, Mamoru
    Horita, Masahiro
    Ishikawa, Yasuaki
    Uraoka, Yukiharu
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 10, NO 11, 2013, 10 (11): : 1561 - 1564
  • [22] AN EXPERIMENTAL INVESTIGATION OF THIN-FILM EVAPORATION
    Sait, H. H.
    Ma, H. B.
    NANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING, 2009, 13 (04) : 218 - 227
  • [23] Thin-film evaporation on microgrooved heatsinks
    Mandel, Raphael
    Shooshtari, Amir
    Ohadi, Michael
    NUMERICAL HEAT TRANSFER PART A-APPLICATIONS, 2017, 71 (02) : 111 - 127
  • [24] Thin-Film Evaporation in an Evaporating Droplet
    Dhavaleswarapu, H. K.
    Migliaccio, C. P.
    Garimella, S. V.
    Murthy, J. Y.
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2009, 131 (08):
  • [25] FILM THICKNESS DISTRIBUTION AT OBLIQUE EVAPORATION
    SVENSSON, SP
    ANDERSSON, TG
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 245 - 247
  • [26] Effect of thickness on characteristics of ZnSe thin film synthesized by vacuum thermal evaporation
    Abu Sayeed, Md
    Rouf, Hasan Khaled
    Hussain, Kazi Md Amjad
    JOURNAL OF THEORETICAL AND APPLIED PHYSICS, 2020, 14 (03) : 251 - 259
  • [27] Fabrication of p-Channel Amorphous Tin Oxide Thin-Film Transistors Using a Thermal Evaporation Process
    Lee, Ho-Nyeon
    Song, Byeong-Jun
    Park, Jae Chul
    JOURNAL OF DISPLAY TECHNOLOGY, 2014, 10 (04): : 288 - 292
  • [28] Thin-film thermal conductivity and thickness measurements using picosecond ultrasonics
    Hostetler, JL
    Smith, AN
    Norris, PM
    MICROSCALE THERMOPHYSICAL ENGINEERING, 1997, 1 (03): : 237 - 244
  • [29] Thin-Film Solar Cells with 19% Efficiency by Thermal Evaporation of CdSe and CdTe
    Ablekim, Tursun
    Duenow, Joel N.
    Zheng, Xin
    Moutinho, Helio
    Moseley, John
    Perkins, Craig L.
    Johnston, Steven W.
    O'Keefe, Patrick
    Colegrove, Eric
    Albin, David S.
    Reese, Matthew O.
    Metzger, Wyatt K.
    ACS ENERGY LETTERS, 2020, 5 (03) : 892 - 896
  • [30] THERMAL-ANALYSIS OF LASER-INDUCED THIN-FILM MELTING AND EVAPORATION
    KINROT, A
    BLOCH, J
    ZEIRI, Y
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (06) : 975 - 980