Simulation of the thin-film thickness distribution for an OLED thermal evaporation process

被引：29

作者：

Lee, Eungki ^{[1
]}

机构：

[1] Kongju Natl Univ, Div Mech & Automot Engn, Cheonan, Chungnam, South Korea

来源：

VACUUM | 2009年 / 83卷 / 05期

关键词：

OLED (organic light-emitting device); Vacuum thermal evaporation; Thin film; Thickness; Uniformity; LAYER; UNIFORMITY;

D O I：

10.1016/j.vacuum.2008.08.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A design of an OLED (organic light-emitting device) fabrication system strongly depends on a thermal evaporation process. In an OLED evaporation process, the essential requirements include good uniformity of the film thickness over a glass substrate. In this paper, a process simulation model was developed to predict the film thickness distribution by understanding system design parameters that affect the uniformity of film thickness. Based on the method developed in this study, the uniformity of the thickness in an organic layer was successfully controlled. The developed method allowed the manufacture of high quality OLED displays. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：848 / 852

页数：5

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