On the formation mechanism of solid-solution Cu-to-Cu joints in the Cu/Ni/Ga/Ni/Cu system

被引:28
作者
Lin, Shih-kang [1 ,2 ]
Yeh, Che-yu [1 ]
Wang, Mei-jun [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan
关键词
Cu-to-Cu bonding; Die attachment; Transient liquid phase bonding; Ga; Interfacial reactions; TRANSIENT LIQUID-PHASE; THROUGH-SILICON; INTERFACIAL REACTIONS; NUMERICAL-METHOD; AG-CU; SOLDER; THICKNESS; GA;
D O I
10.1016/j.matchar.2018.01.020
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Copper (Cu)-to-Cu interconnection is crucial in electronic packaging for applications ranging from three-dimensional integrated circuits to die-attachment in wide band-gap devices. Solid-solution phases are innate with better ductility and electrical and thermal conductivity over intermetallic compounds, which are brittle, electrical resistant, and unstable; yet are commonly seen in electronic joints. The desired solid-solution Cu-to-Cu joints have recently been demonstrated using transient-liquid-phase bonding with gallium (Ga) as the filler material to bond Cu substrates with electroplated nickel (Ni) as under-bump-metallurgy. The Cu/Ni/Ga/Ni/Cu couples can fully transform into the Cu/face-centered cubic (fcc)-(Ni,Cu,Ga)/Cu solid-solution joints. However, why and how the solid-solution joints were formed remains unclear. Here we proposed the formation mechanism of the fcc-(Ni,Cu,Ga) solid-solution joints based on five sets of Cu-Ni-Ga couples, namely the Ni/Ga, Ni/Cu/Ga, Ni/Ni/Ga, (Cu,Ni)/Ga, and Cu/Ni/Ni3Ga7/Ni3Ga7/Ni/Cu reactions. The roles of each element in the Cu-Ga-Ni interactions as well as the reaction progressions are elaborated.
引用
收藏
页码:14 / 23
页数:10
相关论文
共 41 条
[1]   High Density Cu-Sn TLP Bonding for 3D Integration [J].
Agarwal, Rahul ;
Zhang, Wenqi ;
Limaye, Paresh ;
Ruythooren, Wouter .
2009 IEEE 59TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, VOLS 1-4, 2009, :345-349
[2]   Critical interlayer thickness for transient liquid phase bonding in the Cu-Sn system [J].
Bosco, NS ;
Zok, FW .
ACTA MATERIALIA, 2004, 52 (10) :2965-2972
[3]   Lattice thermal conductivity of multi-component alloys [J].
Caro, M. ;
Beland, L. K. ;
Samolyuk, G. D. ;
Stoller, R. E. ;
Caro, A. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 648 :408-413
[4]   An improved numerical method for predicting intermetallic layer thickness developed during the formation of solder joints on Cu substrates [J].
Chada, S ;
Laub, W ;
Fournelle, RA ;
Shangguan, D .
JOURNAL OF ELECTRONIC MATERIALS, 1999, 28 (11) :1194-1202
[5]   Phase transformation and microstructural evolution in solder joints [J].
Chen, Sinn-Wen ;
Wang, Chao-hong ;
Lin, Shih-kang ;
Chiu, Chen-nan ;
Chen, Chih-chi .
JOM, 2007, 59 (01) :39-43
[6]   Phase diagrams of Pb-free solders and their related materials systems [J].
Chen, Sinn-Wen ;
Wang, Chao-Hong ;
Lin, Shih-Kang ;
Chiu, Chen-Nan .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2007, 18 (1-3) :19-37
[7]   An effective approach for three-dimensional finite element analysis of ball grid array typed packages [J].
Cheng, HC ;
Chiang, KN ;
Lee, MH .
JOURNAL OF ELECTRONIC PACKAGING, 1998, 120 (02) :129-134
[8]   Electronic packaging reflow shape prediction for the solder mask defined ball grid array [J].
Chiang, KN ;
Chen, WL .
JOURNAL OF ELECTRONIC PACKAGING, 1998, 120 (02) :175-178
[9]   Overview of transient liquid phase and partial transient liquid phase bonding [J].
Cook, Grant O., III ;
Sorensen, Carl D. .
JOURNAL OF MATERIALS SCIENCE, 2011, 46 (16) :5305-5323
[10]   Trends in automotive power semiconductor packaging [J].
Dietrich, Peter .
MICROELECTRONICS RELIABILITY, 2013, 53 (9-11) :1681-1686