Properties of near-surface layer of 64Zn+ ion hot-implanted Si

被引：4

作者：

Privezentsev, Vladimir ^{[1
]}

Kulikauskas, Vaclav ^{[2
]}

Steinman, Eduard ^{[3
]}

Tereshchenko, Alexey ^{[3
]}

Bazhenov, Anatoly ^{[3
]}

Tabachkova, Nataliya ^{[4
]}

Batrakov, Alexander ^{[5
]}

机构：

[1] Russian Acad Sci, Inst Phys & Technol, Moscow 117218, Russia

[2] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia

[3] Russian Acad Sci, Inst Solid State Phys, Chernogolovka 142432, Moscow Dist, Russia

[4] Natl Univ Sci & Technol MISiS, Moscow 119049, Russia

[5] Natl Res Univ MPEI, Moscow 111250, Russia

来源：

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 12, NO 8 | 2015年 / 12卷 / 08期

关键词：

Si; ion implantation; Zn; nanoparticles; ZnO; NANOPARTICLES;

D O I：

10.1002/pssc.201400234

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated nanoparticles (NPs) formation in Si by Zn-64(+) ion implantation at substrate temperature of 350 degrees C. Hot implantation was chosen to avoid amorphization of Si near-surface layer. In as-implanted samples the Zn crystal NPs were created. Then the samples were subsequently subjected to isochronous annealing in oxygen at elevated temperatures. The depth profile of implanted Zn was analyzed by Rutherford backscattering spectroscopy. The dependence of photo-luminescence spectra on annealing temperatures was observed. In these spectra the peak at 370 nm attributable to ZnO phase and wide peak at 430 nm due to defects were revealed. The visualization and identification of NPs were obtained by transmission electron microscopy and transmission electron diffraction of cross-section samples. From these study it follows, that after annealing at temperature of 700 degrees C and higher the NPs with structure of Zn(core)/ZnO center dot Zn2SiO4(shell) were formed. Auger electron spectroscopy investigation followed the phase content in depth profile was varied from ZnO center dot Zn2SiO4 at a substrate surface to metal Zn in a substrate body. [GRAPHICS] . (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：1170 / 1174

页数：5

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