Two-dimensional analysis of the gate-source distance scaling effects in 4H-SiC MESFETs

被引:8
作者
Deng, Xiaochuan [1 ]
Zhang, Bo [1 ]
Li, Zhaoji [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
关键词
SIC MESFET; POWER; PERFORMANCE; FIELD; FABRICATION; SIMULATION; RF; 4H;
D O I
10.1088/0268-1242/24/1/015011
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two-dimensional dc and small-signal ac analyses of the gate-source scaling effects in SiC-based high-power field-effect transistors have been performed in this paper. The simulation results show that a downscaling of the gate-source distance can improve device performance, enhancing drain current, transconductance and maximum oscillation frequency. This influence is associated with the dynamic characteristic of electrons in SiC MESFETs, which leads to a linear velocity regime in the source access region, even for high drain voltages. The variations of gate-to-source capacitance, gate-to-drain capacitance, cut-off frequency and maximum oscillation frequency with respect to the change in gate-source length have also been studied in detail. The obtained results can be used for a design guideline for the layout of 4H-SiC MESFETs.
引用
收藏
页数:7
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