The use of high frequency thermal plasma to synthesise nanoscale ceramic powders

被引:0
作者
Segers, L [1 ]
Vernin, P [1 ]
机构
[1] Free Univ Brussels, Genie Met CP 165 71, B-1050 Brussels, Belgium
来源
EURO CERAMICS VII, PT 1-3 | 2002年 / 206-2卷
关键词
thermal plasma; plasma spraying; ceramic powders; nanoparticles; nitrides; carbides; oxides;
D O I
10.4028/www.scientific.net/KEM.206-213.7
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper describes three laboratory scale installations based on high frequency plasma torches to produce and use nanometric size ceramic powders. Two were used to synthesise Si3N4, SiO2 and SiC from SiCl4 precursor gas and NH3, O-2 and CH4 reactive gases. The last one was designed for high frequency plasma spraying.
引用
收藏
页码:7 / 10
页数:4
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