Modeling of lifetime distribution in a multicrystalline silicon ingot

被引:4
作者
Boulfrad, Yacine [1 ]
Stokkan, Gaute [1 ]
M'hamdi, Mohammed [2 ]
Ovrelid, Eivind [3 ]
Arnberg, Lars [1 ]
机构
[1] Norwegian Univ Sci & Technol, Dept Mat Sci & Engn, Alfred Getz 2B, N-7491 Trondheim, Norway
[2] SINTEF Mat & Chem, N-7491 Trondheim, Norway
[3] SINTEF Mat Technol, N-0314 Oslo, Norway
来源
GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XIV | 2011年 / 178-179卷
关键词
Multicrystalline silicon; ingot; defects; iron; dislocations; lifetime; IRON; DIFFUSION;
D O I
10.4028/www.scientific.net/SSP.178-179.507
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The lifetime distribution of a multicrystalline silicon ingot of 250 mm diameter and 100 mm height, grown by unidirectional solidification has been modeled. The model computes the combined effect of interstitial iron and dislocation distribution on minority carrier lifetime of the ingot based on the Shockley Read Hall (SRH) recombination model for iron point defects and Donolato's model for recombination on dislocations. The iron distribution model was based on the solid state diffusion of iron from the crucible and coating to the ingot during its solidification and cooling, taking into account segregation of iron to the melt and back diffusion after the end of solidification. The dislocation density distribution is determined from experimental data obtained by PVScan analysis from a vertical cross section slice. The calculated lifetime is fitted to the measured one by fitting parameters relating the recombination strength and the local concentration of iron.
引用
收藏
页码:507 / +
页数:2
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