Tailoring electron energy distribution functions through energy confinement in dual radio-frequency driven atmospheric pressure plasmas

被引：38
作者：
O'Neill, C. [1 ]
Waskoenig, J. [1 ]
Gans, T. [1 ,2 ]
机构：
[1] Queens Univ Belfast, Sch Math & Phys, Ctr Plasma Phys, Belfast BT7 1NN, Antrim, North Ireland
[2] Univ York, York Plasma Inst, Dept Phys, York YO10 5DD, N Yorkshire, England
来源：
APPLIED PHYSICS LETTERS | 2012年 / 101卷 / 15期
基金：
英国工程与自然科学研究理事会;
关键词：
DISCHARGE; MODELS;
D O I：
10.1063/1.4758463
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A multi-scale numerical model based on hydrodynamic equations with semi-kinetic treatment of electrons is used to investigate the influence of dual frequency excitation on the effective electron energy distribution function (EEDF) in a radio-frequency driven atmospheric pressure plasma. It is found that variations of power density, voltage ratio, and phase relationship provide separate control over the electron density and the mean electron energy. This is exploited to directly influence both the phase dependent and time averaged effective EEDF. This enables tailoring the EEDF for enhanced control of non-equilibrium plasma chemical kinetics at ambient pressure and temperature. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4758463]
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页数：4
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