Crystallization of Ge2Sb2Te5 phase-change optical disk media

被引:0
作者
Liu, B [1 ]
Ruan, H [1 ]
Gan, FX [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
来源
CHINESE PHYSICS | 2002年 / 11卷 / 03期
关键词
Ge2Sb2Te5; phase-change; initialization; face-centred-cubic;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this paper, the crystallization behaviour of amorphous Ge2Sb2Te5 thin films is investigated using differential scanning calorimetry), x-ray diffraction and optical transmissivity measurements. It is indicated that only the amorphous phase to face-centred-cubic phase transformation occurs during laser annealing of the normal phase-change structure, which is a benefit for raising the phase-change optical disk's 'carrier-to-noise ratio (CNR). For amorphous Ge2Sb2Te5 thin films,, the crystallization temperature is about 200degreesC and the melting temperature is 546.87degreesC. The activation energy for the crystallization, E-a, is 2.25eV. The crystallization dynamics for Ge2Sb2Te5 thin films obeys the law of nucleation and growth reaction. The sputtered Ge2Sb2Te5 films were initialized by an initializer unit. The initialization conditions have a great effect on the reflectivity contrast of the Ge2Sb2Te5 phase-change optical disk.
引用
收藏
页码:293 / 297
页数:5
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