Z-Axis Magnetometers for MEMS Inertial Measurement Units Using an Industrial Process

被引：59

作者：

Langfelder, Giacomo ^{[1
]}

Buffa, Cesare ^{[1
]}

Frangi, Attilio ^{[2
,3
]}

Tocchio, Alessandro ^{[1
]}

Lasalandra, Ernesto ^{[4
]}

Longoni, Antonio ^{[1
]}

机构：

[1] Politecn Milan, Dept Elect & Informat Technol, I-20133 Milan, Italy

[2] Politecn Milan, Dept Struct Engn, I-20133 Milan, Italy

[3] Ecole Polytech, Dept Mech, F-91128 Palaiseau, France

[4] ST Microelect, MEMS, Sensors & High Performance Analog Div, I-20010 Cornaredo, Italy

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 2013年 / 60卷 / 09期

关键词：

Inertial measurement units (IMUs); magnetometers; microelectromechanical systems (MEMS); motion control; smart sensors;

D O I：

10.1109/TIE.2012.2210958

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The combination of multiaxis and multiparameter microelectromechanical systems (MEMS) in the same technology would result in very cheap and smart inertial measurement units (IMUs). In this paper, aZ-axis Lorentz-force-based magnetometer whose design and optimization are reviewed taking into account the constraints of an industrial MEMS technology (process and packaging) already used for accelerometers and gyroscopes is presented. How this impacts the design guidelines is shown; in particular, a very compact device that can fit in the same package of the gyroscope to realize an all-MEMS seven-degree-of-freedom IMU is proposed and experimentally tested. The device shows a mechanical sensitivity of around 0.8 aF/(mu T . mA) with a resolution of 520 (nT . mA)/root Hz over a signal bandwidth of 50 Hz at room temperature. Coupled to a transimpedance amplifier, the system shows an overall sensitivity of 150 mu V/mu T at 250 mu A of peak driving current.

引用

页码：3983 / 3990

页数：8

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