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- [2] Low temperature plasma enhanced chemical vapor deposition of silicon nitride and oxynitride layers PHYSICS OF SEMICONDUCTOR DEVICES, VOLS 1 AND 2, 1998, 3316 : 573 - 579
- [3] Characterization of a low temperature, low pressure plasma enhanced chemical vapor deposition tetraethylorthosilicate oxide deposition process JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1389 - 1393
- [4] Low Temperature Synthesis of Nanocrystalline Silicon and Silicon Oxide Films by Plasma Chemical Vapor Deposition AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, 2008, 1066 : 167 - +
- [9] Influence of Deposition Temperature on Microcrystalline Silicon Thin Film Prepared by Plasma Enhanced Chemical Vapor Deposition LIQUID CRYSTALS AND RELATED MATERIALS II, 2012, 181-182 : 401 - 404