Precision surface measurement

被引:27
作者
Jiang, X. [1 ]
机构
[1] Univ Huddersfield, Sch Comp & Engn, Ctr Precis Technol, Huddersfield HD1 3DH, W Yorkshire, England
来源
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2012年 / 370卷 / 1973期
基金
英国工程与自然科学研究理事会;
关键词
precision measurement; optical interferometry; surfaces; PHASE-SHIFTING INTERFEROMETRY; FIBER INTERFEROMETER; METROLOGY; PROFILOMETER; MICROSCOPY; VIBRATION; NOISE;
D O I
10.1098/rsta.2011.0217
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Surface size, geometry and texture are some of the most influential subjects in the fields of precision and ultra-precision engineering, defining the functional interface through which emerging products operate. Next-generation products demand super-smooth surfaces, freeform geometries or even deterministically introduced microstructures to provide functional performance. Technological progress using these surfaces types is possible only if the associated manufacturing processes are rigorously controlled and the surfaces are measurable. Metrology for advanced surfaces is not established. The current state of the art is challenged in respect to (i) surface characteristics, extremity of size, ultra precision, quality, geometric complexity, or combinations of these aspects, and (ii) measurement technology for the manufacturing environment, in particular, online, non-contact, high speed, ease of use, small footprint and robustness. This study addresses the challenges in this subject area and discusses some fundaments and principles derived from interdisciplinary research. The combination of these aspects is enabling the creation of manufacturing-environment-based measurement technology. This is expected to facilitate advanced surface manufacture over a wide range of sectors, including large science programmes and high-technology engineering.
引用
收藏
页码:4089 / 4114
页数:26
相关论文
共 34 条
[1]   Thermodynamic phase noise in fibre interferometers [J].
AnnovazziLodi, V ;
Donati, S ;
Merlo, S .
OPTICAL AND QUANTUM ELECTRONICS, 1996, 28 (01) :43-49
[2]  
[Anonymous], 2008, ERCADG228117
[3]  
[Anonymous], 2008, GRS8534401 RCUK BAS
[4]   Development of a rapid profilometer with an application to roundness gauging [J].
Bauza, Marcin B. ;
Woody, Shane C. ;
Smith, Stuart T. ;
Hocken, Robert J. .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2006, 30 (04) :406-413
[5]  
Bruker A. X. S., 2011, NP FLEX BROCHURE
[6]   MULTIPLE-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY [J].
CHENG, YY ;
WYANT, JC .
APPLIED OPTICS, 1985, 24 (06) :804-807
[7]   2-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY [J].
CHENG, YY ;
WYANT, JC .
APPLIED OPTICS, 1984, 23 (24) :4539-4543
[8]   ABSOLUTE MEASUREMENT OF SURFACE-ROUGHNESS [J].
CREATH, K ;
WYANT, JC .
APPLIED OPTICS, 1990, 29 (26) :3823-3827
[9]   Advances in scanning force microscopy for dimensional metrology [J].
Danzebrink, H. -U. ;
Koenders, L. ;
Wilkening, G. ;
Yacoot, A. ;
Kunzmann, H. .
CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2006, 55 (02) :841-878
[10]  
Drabarek P, 2004, U.S. Patent, Patent No. [6,741,355, 6741355]