AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor

被引:9
作者
Yang, Pengfei [1 ]
Wen, Xiaolong [2 ]
Chu, Zhaozhi [3 ]
Ni, Xiaoming [1 ]
Peng, Chunrong [4 ]
机构
[1] Beijing Informat Sci & Technol Univ, Sch Appl Sci, Beijing 100192, Peoples R China
[2] Univ Sci & Technol Beijing, Sch Math & Phys, Beijing 100083, Peoples R China
[3] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[4] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing 100094, Peoples R China
基金
国家重点研发计划;
关键词
electric field sensor; resonance; micro-electro-mechanical systems (MEMS); AC/DC electric fields; demodulation methods; frequency bandwidth; power systems; SENSOR; DESIGN; MILL; INSULATORS;
D O I
10.3390/mi11050511
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Electric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned with proposing new structures or improving the resolution, and there are no systematic studies on the signal characteristics of the microsensor output and the demodulation methods under different electric fields. In this paper, the use of an improved resonant microsensor with coplanar electrodes, and the signal characteristics under a DC field, power frequency field, and AC/DC hybrid fields were thoroughly analyzed respectively, and matching demodulation methods derived from synchronous detection were proposed. We theoretically obtained that the frequencies of the detectable electric fields should be less than half of the resonant frequency of the microsensor, and that the sensitivities of the microsensor were identical for AC/DC hybrid fields with different frequencies. Experiments were conducted to verify the proposed demodulation methods. Within electric field ranges of 0-667 kV/m, the uncertainties were 2.4% and 1.5% for the most common DC and 50 Hz power frequency fields, respectively. The frequency characteristic test results of the microsensor were in agreement with those of the theoretical analysis in the range of 0-1 kHz.
引用
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页数:16
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