electric field sensor;
resonance;
micro-electro-mechanical systems (MEMS);
AC/DC electric fields;
demodulation methods;
frequency bandwidth;
power systems;
SENSOR;
DESIGN;
MILL;
INSULATORS;
D O I:
10.3390/mi11050511
中图分类号:
O65 [分析化学];
学科分类号:
070302 ;
081704 ;
摘要:
Electric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned with proposing new structures or improving the resolution, and there are no systematic studies on the signal characteristics of the microsensor output and the demodulation methods under different electric fields. In this paper, the use of an improved resonant microsensor with coplanar electrodes, and the signal characteristics under a DC field, power frequency field, and AC/DC hybrid fields were thoroughly analyzed respectively, and matching demodulation methods derived from synchronous detection were proposed. We theoretically obtained that the frequencies of the detectable electric fields should be less than half of the resonant frequency of the microsensor, and that the sensitivities of the microsensor were identical for AC/DC hybrid fields with different frequencies. Experiments were conducted to verify the proposed demodulation methods. Within electric field ranges of 0-667 kV/m, the uncertainties were 2.4% and 1.5% for the most common DC and 50 Hz power frequency fields, respectively. The frequency characteristic test results of the microsensor were in agreement with those of the theoretical analysis in the range of 0-1 kHz.
机构:
Simon Fraser Univ, Sch Mechatron Syst Engn, Surrey, BC V3T 0A3, CanadaUniv Cent Florida, Dept Elect & Comp Engn, Dynam Microsyst Lab, Orlando, FL 32816 USA
Bahreyni, Behraad
Lee, Joshua E. -Y.
论文数: 0引用数: 0
h-index: 0
机构:
City Univ Hong Kong, State Key Lab Millimeter Waves, Kowloon, Hong Kong, Peoples R ChinaUniv Cent Florida, Dept Elect & Comp Engn, Dynam Microsyst Lab, Orlando, FL 32816 USA
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Chen, Xianxiang
Peng, Chunrong
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Peng, Chunrong
Tao, Hu
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Tao, Hu
Ye, Chao
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Ye, Chao
Bai, Qiang
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Bai, Qiang
Chen, Shaofeng
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Chen, Shaofeng
Xia, Shanhong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Chu, Zhaozhi
Peng, Chunrong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Peng, Chunrong
Ren, Ren
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Ren, Ren
Ling, Biyun
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Ling, Biyun
Zhang, Zhouwei
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Zhang, Zhouwei
Lei, Hucheng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Lei, Hucheng
Xia, Shanhong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
机构:
Simon Fraser Univ, Sch Mechatron Syst Engn, Surrey, BC V3T 0A3, CanadaUniv Cent Florida, Dept Elect & Comp Engn, Dynam Microsyst Lab, Orlando, FL 32816 USA
Bahreyni, Behraad
Lee, Joshua E. -Y.
论文数: 0引用数: 0
h-index: 0
机构:
City Univ Hong Kong, State Key Lab Millimeter Waves, Kowloon, Hong Kong, Peoples R ChinaUniv Cent Florida, Dept Elect & Comp Engn, Dynam Microsyst Lab, Orlando, FL 32816 USA
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Chen, Xianxiang
Peng, Chunrong
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Peng, Chunrong
Tao, Hu
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Tao, Hu
Ye, Chao
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Ye, Chao
Bai, Qiang
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Bai, Qiang
Chen, Shaofeng
论文数: 0引用数: 0
h-index: 0
机构:Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
Chen, Shaofeng
Xia, Shanhong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Chu, Zhaozhi
Peng, Chunrong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Peng, Chunrong
Ren, Ren
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Ren, Ren
Ling, Biyun
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Ling, Biyun
Zhang, Zhouwei
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Zhang, Zhouwei
Lei, Hucheng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
Lei, Hucheng
Xia, Shanhong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R ChinaChinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China