Real-time methodologies for monitoring airborne molecular contamination in modern DUV photolithography facilities

In this paper,the authors discuss the critical airborne molecular contaminants. found in DW photolithography facilities, They present an overview of real-time monitoring methodologies that can detect and measure these contaminants at low concentrations, enabling users to anticipate and resolve AMC challenges before production problems can result. Citing actual examples of how real-time monitoring is being employed in production fabs, the authors examine single point investigative and multi-point process monitoring strategies, compare the different monitoring technologies now is use, and describe critical points to monitor in tracks, steppers, clean rooms, and air filtration systems. As a separate item, the authors describe an innovative, practical approach to quantifying resist environmental sensitivity. It is anticipated this work will result in a standard methodology that can be used at individual process sites to determine the resist sensitivity to airborne: molecular contamination under Ideal operating conditions.