Tailoring properties of lossy-mode resonance optical fiber sensors with atomic layer deposition technique

被引：32
作者：
Kosiel, Kamil [1 ]
Koba, Marcin [2 ,3 ]
Masiewicz, Marcin [2 ]
Smietana, Mateusz [2 ]
机构：
[1] Inst Electr Mat Technol, Al Lotnikow 32-46, PL-02668 Warsaw, Poland
[2] Inst Microelect & Optoelect, Koszykowa 75, PL-00662 Warsaw, Poland
[3] Natl Inst Telecommun, Szachowa 1, PL-04894 Warsaw, Poland
来源：
OPTICS AND LASER TECHNOLOGY | 2018年 / 102卷
关键词：
Optical fiber sensors; Lossy-mode resonance; Thin films; Atomic layer deposition; Optical properties; REFRACTIVE-INDEX SENSITIVITY; LONG-PERIOD GRATINGS; SILICON-NITRIDE; THIN-FILMS; METAL; ALD; NANOFILM; DEVICE;
D O I：
10.1016/j.optlastec.2018.01.002
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The paper shows application of atomic layer deposition (ALD) technique as a tool for tailoring sensorial properties of lossy-mode-resonance (LMR)-based optical fiber sensors. Hafnium dioxide (HfO2), zirconium dioxide (ZrO2), and tantalum oxide (TaxOy), as high-refractive-index dielectrics that are particularly convenient for LMR-sensor fabrication, were deposited by low-temperature (100 degrees C) ALD ensuring safe conditions for thermally vulnerable fibers. Applicability of HfO2 and ZrO2 overlays, deposited with ALD-related atomic level thickness accuracy for fabrication of LMR-sensors with controlled sensorial properties was presented. Additionally, for the first time according to our best knowledge, the double layer overlay composed of two different materials -silicon nitride (SixNy) and TaxOy-is presented for the LMR fiber sensors. The thin films of such overlay were deposited by two different techniques PECVD (the SixNy) and ALD (the TaxOy). Such approach ensures fast overlay fabrication and at the same time facility for resonant wavelength tuning, yielding devices with satisfactory sensorial properties. (C) 2018 Elsevier Ltd. All rights reserved.
引用
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页码：213 / 221
页数：9
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