Interfacial Failure in Flexible Electronic Devices

被引:42
作者
Chen, Hang [1 ]
Lu, Bing-Wei [1 ]
Lin, Yuan [2 ]
Feng, Xue [1 ]
机构
[1] Tsinghua Univ, Ctr Mech & Mat, Dept Engn Mech, AML, Beijing 100084, Peoples R China
[2] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
基金
中国国家自然科学基金;
关键词
Flexible electronics; interfacial failures; failure criteria; SINGLE-CRYSTAL SILICON;
D O I
10.1109/LED.2013.2289932
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Flexible inorganic electronics with the delicate integration of stiff electronic films on soft substrate have attracted much attention recently. For the large mismatch of mechanical properties between the soft substrate and stiff electronic films in such devices, interfacial failures are always extremely dangerous. In this letter, we present theoretical analysis for the interfacial failures based on fracture mechanics and establish the criteria for the failure modes. It is found that the thin films always slip first and then transit to delamination from the substrate as the increasing of applied loading. The theoretical prediction is consistent with the experiment, which can guide the design and evaluate the reliability of flexible electronics.
引用
收藏
页码:132 / 134
页数:3
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