Output Nonlinearity Caused by Junction Capacitance of Switches in the Auxiliary Resonant Commutated Pole Soft-Switching Inverter

Output current nonlinearity error is the key problem which leads to nanometer positioning error in ultra-precision positioning applications. The auxiliary resonant commutated pole inverter (ARCPI) as a zero-voltage switching inverter has the advantage of low dead-time effect. However, the junction capacitances of switches are also one of the error sources in the converter, which hasn't analyzed before. Therefore, the output nonlinearity caused by junction capacitance of switches in the ARCPI is researched. In this paper, the converter model considering the junction capacitances is built. The commutation considering the junction capacitances is analyzed. The output voltage error caused by the junction capacitances is calculated. A prototype was developed to verify the effectiveness of proposed methods.