Fabrication of a Boersch phase plate for phase contrast imaging in a transmission electron microscope

被引：56
作者：
Schultheiss, K [1 ]
Pérez-Willard, F
Barton, B
Gerthsen, D
Schröder, RR
机构：
[1] Univ Karlsruhe, Lab Elektronenmikroskopie, D-76128 Karlsruhe, Germany
[2] Univ Karlsruhe, DFG Ctr Funct Nanostruct, D-76128 Karlsruhe, Germany
[3] Max Planck Inst Biophys, Dept Biol Struct, D-60438 Frankfurt, Germany
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 03期
关键词：
D O I：
10.1063/1.2179411
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The Boersch phase plate for a transmission electron microscope (TEM) offers major advantages over other phase plate concepts. However, due to its miniature dimensions, it could not be constructed and implemented so far. We report the first successful fabrication of a Boersch phase plate, which was produced by a combination of electron-beam and focused ion-beam lithography on a freestanding silicon nitride membrane. The manufactured multilayer electrode structure was tested for its functionality as an electrostatic einzel lens in a TEM. First experiments show that it can be used as a phase shifting device, as proposed by Boersch, to optimize phase contrast transfer in transmission electron microscopy. (c) 2006 American Institute of Physics.
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