Miniaturization of surface acoustic waves rotary motor

被引:8
作者
Cheng, LP [1 ]
Zhang, GM [1 ]
Zhang, SY [1 ]
Yu, J [1 ]
Shui, XJ [1 ]
机构
[1] Nanjing Univ, Inst Acoust, Lab Modern Acoust, Nanjing 210093, Peoples R China
基金
中国国家自然科学基金;
关键词
surface acoustic wave; ultrasonic motor; rotary motor; miniaturization;
D O I
10.1016/S0041-624X(02)00264-0
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
This paper presents the experimental study of a miniaturized surface acoustic waves (SAWs) rotary motor and the theoretical calculation. After the first success in SAW rotary motor operating at 9.85 MHz, a smaller rotary motor is designed. With the operating frequency of 30 MHz and the driving voltage of 120 Vp-p, the motor can rotate at a speed of 270 rpm. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:591 / 594
页数:4
相关论文
共 8 条
[1]   Future of actuators and microsystems [J].
Fujita, H .
SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (1-2) :105-111
[2]  
KUROSAWA M, 1994, ULTRASON, P535, DOI 10.1109/ULTSYM.1994.401645
[3]  
KUROSAWA MK, US9833 IEICE, P55
[4]   Simulation of surface acoustic wave motor with spherical slider [J].
Morita, T ;
Kurosawa, MK ;
Higuchi, T .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1999, 46 (04) :929-934
[5]  
OSAKABE N, 1998, P IEEE WOKSH MICR EL
[6]  
Takasaki M, 1998, ULTRASON, P679, DOI 10.1109/ULTSYM.1998.762239
[7]  
Timoshenko S. P., 1970, THEORY ELASTICITY
[8]   Surface acoustic wave rotation motor [J].
Zhang, GM ;
Cheng, LP ;
Zhang, SY ;
Yu, J ;
Shui, XJ .
ELECTRONICS LETTERS, 2000, 36 (16) :1437-1438