Strained GaSb/AlAsSb quantum wells for p-channel field-effect transistors

被引:51
作者
Bennett, Brian R. [1 ]
Ancona, Mario G. [1 ]
Boos, J. Brad [1 ]
Canedy, Corwyn B. [1 ]
Khan, Saara A. [1 ]
机构
[1] USN, Res Lab, Div Elect Sci & Technol, Washington, DC 20375 USA
关键词
Molecular beam epitaxy; Quantum wells; Semiconducting III-V materials; Semiconducting gallium compounds; Semiconducting ternary compounds; Field effect transistors;
D O I
10.1016/j.jcrysgro.2008.10.025
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Quantum wells of GaSb were grown by molecular beam epitaxy on GaAs substrates. The buffer layer and barrier layers consisted of relaxed AlAs(x)Sb(1-x). The composition of the AIAs(x)Sb(1-x) was varied to produce compressive biaxial strains in the GaSb. The confinement and strain in the GaSb quantum wells lift the degeneracy in the valence band, resulting in lower in-plane effective mass and higher mobility. A threefold enhancement of mobility was achieved, with room-temperature mobilities as high as 1350 cm(2)/Vs and 77K values as high as 10,400 cm(2)/V s for strains near 1%. These quantum wells should be suitable for high-performance p-channel field-effect transistors for complementary circuits operating at extremely low power. Published by Elsevier B.V.
引用
收藏
页码:47 / 53
页数:7
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