LARGE AREA PIEZOELECTRIC ACTUATORS USING METAL FOIL SUBSTRATES WITH Pb(Zrx,Ti1-x)O3 THIN FILMS

被引：3
|
作者：
Kuegeler, C. [1 ]
Rosezin, R. [1 ]
Schneller, T. [2 ]
Boettger, U. [2 ]
Waser, R. [1 ,2 ]
机构：
[1] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany
[2] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech, D-52074 Aachen, Germany
来源：
INTEGRATED FERROELECTRICS | 2008年 / 100卷
关键词：
D O I：
10.1080/10584580802543375
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the deposition of Pb(Zrx,Ti1 - x)O3 (PZT) thin films by chemical solution deposition (CSD) on stainless steel foils. The electrical characterization proves good ferroelectric properties with a remnant polarization of 38 C/cm2. Since PZT is also piezoelectric the 35 m and 50 m thick metal foils are used to make piezoelectric actuated cantilever beams of several millimeter lengths. Actuated with 10-30 V a displacement up to 32 m was measured in quasi-static mode. In resonance mode the displacement increases several times at the same driving voltage.
引用
收藏
页码：254 / 262
页数：9
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