Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures

被引：12

作者：

Dai, W

Oropeza, C

Lian, K

Wang, WJ ^{[1
]}

机构：

[1] Louisiana State Univ, Dept Mech Engn, Baton Rouge, LA 70803 USA

[2] Louisiana State Univ, Ctr Adv Microstruct & Devices, Baton Rouge, LA 70806 USA

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 04期

关键词：

D O I：

10.1007/s00542-005-0056-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

One of the major difficulties faced by MEMS researchers today is the lack of data regarding properties of electroplated metals or alloys of which microstructures and microdevices are fabricated, especially in LIGA technology. These mechanical properties cannot be extrapolated from macro-scale data without experimental verification. Therefore, study on material properties of microfabricated structures is of vital importance to the development of LIGA technology and to its industrial applications. This paper reports an experiment scheme and UV-LIGA microfabrication technology to study the fracture toughness of nickel micro specimens. The devised testing mechanism demonstrated compatibility with the fabricated samples and capability of performing the desired experimentation by generating resistance-to-fracture values of the nickel specimens. The same experiment scheme and sample fabrication technology can be used in future work to study the fracture toughness values for LIGA fabricated samples in various metals and alloys.

引用

页码：306 / 314

页数：9

共 34 条

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