Performance-Enhancing Selector via Symmetrical Multilayer Design

被引:74
作者
Sun, Yiming [1 ]
Zhao, Xiaolong [2 ]
Song, Cheng [1 ]
Xu, Kun [3 ]
Xi, Yue [4 ]
Yin, Jun [1 ]
Wang, Ziyu [1 ]
Zhou, Xiaofeng [1 ]
Chen, Xianzhe [1 ]
Shi, Guoyi [1 ]
Lv, Hangbing [2 ]
Liu, Qi [2 ]
Zeng, Fei [1 ]
Zhong, Xiaoyan [3 ]
Wu, Huaqiong [4 ]
Liu, Ming [2 ]
Pan, Feng [1 ]
机构
[1] Tsinghua Univ, Key Lab Adv Mat, Sch Mat Sci & Engn, MOE, Beijing 100084, Peoples R China
[2] Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
[3] Tsinghua Univ, Natl Ctr Electron Microscopy Beijing, State Key Lab New Ceram & Fine Proc, Key Lab Adv Mat,MOE,Sch Mat Sci & Engn, Beijing 100084, Peoples R China
[4] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
1S1R; conductive filaments; multilayers; selector; TaOx; threshold switching; CONDUCTIVE FILAMENT; RESISTIVE MEMORY; RECENT PROGRESS; MECHANISMS; DEVICES;
D O I
10.1002/adfm.201808376
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Two-terminal selectors with high nonlinearity, based on bidirectional threshold switching (TS) behaviors, are considered as a crucial element of crossbar integration for emerging nonvolatile memory and neuromorphic network. Although great efforts have been made to obtain various selectors, existing selectors cannot fully satisfy the rigorous standard of assorted memristive elements and it is in great demand to enhance the performance. Here, a new type of Ag/TaOx/TaOy/TaOx/Ag (x < y) selector based on homogeneous trilayered oxides is developed to attain the required parameters including bidirectional TS operation, a large selectivity of approximate to 10(10), a high compliance current up to 1 mA, and ultralow switching voltages under 0.2 V. Tunable operation voltages can be realized by modulating the thickness of inserted TaOy. All-TaOx-based integrated 1S1R (one selector and one memristor) cells, prepared completely by magnetron sputtering and no need of a middle electrode, exhibit a nonlinear feature, which is quite characteristic for the crossbar devices, avoiding undesired crosstalk current issues. The tantalum-oxide-based homojunctions offer high insulation, low ion mobility, and rich interfaces, which is responsible for the modulation of Ag conductive filaments and corresponding high-performance cation-based selector. These findings might advance practical implementation of two-terminal selectors in emerging memories, especially resistive random access memories.
引用
收藏
页数:9
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