A 2.5D Integrated Voltage Regulator Using Coupled-Magnetic-Core Inductors on Silicon Interposer

被引：111

作者：

Sturcken, Noah ^{[1
]}

O'Sullivan, Eugene J. ^{[2
]}

Wang, Naigang ^{[2
]}

Herget, Philipp ^{[3
]}

Webb, Bucknell C. ^{[2
]}

Romankiw, Lubomyr T. ^{[2
]}

Petracca, Michele ^{[1
]}

Davies, Ryan ^{[1
]}

Fontana, Robert E., Jr. ^{[3
]}

Decad, Gary M. ^{[3
]}

JohnKymissis, Ioannis ^{[1
]}

Peterchev, Angel V. ^{[4
]}

Carloni, Luca P. ^{[1
]}

Gallagher, William J. ^{[2
]}

Shepard, Kenneth L. ^{[1
]}

机构：

[1] Columbia Univ, New York, NY 10027 USA

[2] IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA

[3] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

[4] Duke Univ, Durham, NC 27710 USA

来源：

IEEE JOURNAL OF SOLID-STATE CIRCUITS | 2013年 / 48卷 / 01期

关键词：

Buck converter; DC-DC power conversion; Integrated Voltage Regulator (IVR); switched inductor; 2.5D integration;

D O I：

10.1109/JSSC.2012.2221237

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power inductors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a set of eight coupled inductors that each occupies 0.245 mm(2) and provides 12.5 nH with 270 m Omega. With early inductor prototypes, the IVR efficiency for a 1.8 V: 1.0 V conversion ratio peaks at 71% with FEOL current density of 10.8 A/mm(2) and inductor current density of 1.53 A/mm(2). At maximum load current, 69% conversion efficiency and 1.8 V: 1.2 V conversion ratio the FEOL current density reaches 22.6 A/mm(2) and inductor current density reaches 3.21 A/mm(2).

引用

页码：244 / 254

页数：11

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