Towards a laser fluence dependent nanostructuring of thin Au films on Si by nanosecond laser irradiation

被引：38

作者：

Ruffino, F. ^{[1
,2
]}

Pugliara, A. ^{[1
]}

Carria, E. ^{[1
,2
]}

Romano, L. ^{[1
,2
]}

Bongiorno, C. ^{[3
]}

Fisicaro, G. ^{[1
,3
]}

La Magna, A. ^{[3
]}

Spinella, C. ^{[3
]}

Grimaldi, M. G. ^{[1
,2
]}

机构：

[1] Univ Catania, Dipartimento Fis & Astron, I-95123 Catania, Italy

[2] MATIS CNR IMM, I-95123 Catania, Italy

[3] CNR IMM, I-95121 Catania, Italy

来源：

APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 23期

关键词：

Nanosecond laser irradiation; Gold; Silicon; Nanostructuring; Atomic force microscopy; Scanning electron microscopy; Transmission electron microscopy; FEMTOSECOND LASER; GOLD-FILMS; NANOPARTICLES; GROWTH; MANIPULATION; SHAPE; INTERFACE; SURFACES; CO;

D O I：

10.1016/j.apsusc.2011.12.087

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this work, we study the nanostructuring effects of nanosecond laser irradiations on 5 nm thick Au film sputter-deposited on Si. After deposition of Au on Si substrate, nanosecond laser irradiations were performed increasing the laser fluence from 750 to 1500 mJ/cm(2). Several analyses techniques, such as Rutherford backscattering spectrometry, scanning electron microscopy, atomic force microscopy, and transmission electron microscopy were crossed to study the morphological evolution of the Au film as a function of laser fluence. In particular, the formation of Au nanoparticles was observed. The analyses allowed a quantitative evaluation of the evolution of the nanoparticles size, surface density, and shape as a function of the laser fluence. Therefore, a control the structural properties of the Au nanoparticles is reached, for example, for applications in Si nanowires growth or plasmonics. (C) 2011 Elsevier B. V. All rights reserved.

引用

页码：9128 / 9137

页数：10

共 67 条

[1] Eutectic reaction of gold thin-films deposited on silicon surface [J].