Synthesis of titanium-oxide nanoparticles with size and stoichiometry control

被引：15

作者：

Gunnarsson, Rickard ^{[1
]}

Helmersson, Ulf ^{[1
]}

Pilch, Iris ^{[2
]}

机构：

[1] Linkoping Univ, Plasma & Coatings Phys Div, IFM Mat Sci, S-58183 Linkoping, Sweden

[2] Linkoping Univ, Thin Film Phys Div, IFM Mat Sci, S-58183 Linkoping, Sweden

来源：

JOURNAL OF NANOPARTICLE RESEARCH | 2015年 / 17卷 / 09期

基金：

瑞典研究理事会;

关键词：

Titanium dioxide; TiO2; Reactive sputtering; Size control; Composition control; Gas flow sputtering; Aerosols; REACTIVE SPUTTERING PROCESSES; MAGNETRON; DEPOSITION; FILMS;

D O I：

10.1007/s11051-015-3158-3

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Ti-O nanoparticles have been synthesized via hollow cathode sputtering in an Ar-O-2 atmosphere using high power pulsing. It is shown that the stoichiometry and the size of the nanoparticles can be varied independently, the former through controlling the O-2 gas flow and the latter by the independent biasing of two separate anodes in the growth zone. Nanoparticles with diameters in the range of 25-75 nm, and with different Ti-O compositions and crystalline phases, have been synthesized.

引用

页数：11

共 20 条

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