Grooved multi-pole magnetic gratings for high-resolution positioning systems

被引：7

作者：

Xu, Zhi-Hao ^{[1
]}

Tseng, Bin-Hui ^{[2
]}

Chang, Ching ^{[2
]}

Wang, Sheng-Ching ^{[3
]}

Chin, Tsung-Shune ^{[2
]}

Sung, Cheng-Kuo ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 30013, Taiwan

[2] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 40724, Taiwan

[3] Natl United Univ, Dept Mech Engn, Miaoli 36003, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2015年 / 54卷 / 06期

关键词：

VOLTAGE WAVE-FORM; ENCODER; ELECTRODEPOSITION; FILMS; FIELD;

D O I：

10.7567/JJAP.54.06FP01

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Magnetic encoders are much advantageous for precision positioning specifically under harsh environments. The finer the magnetic pole-pitches of the magnetic scale in a magnetic encoder the higher the resolution of the encoder. In this paper, a grooved multi-pole magnetic grating (MPMG) is substituted for conventional non-structured magnetic scale. A MPMG with pole-pitch of 200 mu m was prepared by photo-lithography and electrodeposition. Simulation was first done to attain the relationship among magnetic flux density, magnetic properties of electrodeposited alloy layers, magnetizing directions and the grating dimensions. The MPMG can be fully magnetized for use by just a single pulse in a solenoid coil. Magnetic properties were investigated in which CoNiP layers were electrodeposited under various current densities. Measured magnetic flux densities versus grating heights, magnetizing directions and detection gaps on magnetized MPMG validate the applicability of ultra-fine pitched MPMG. (C) 2015 The Japan Society of Applied Physics

引用

页数：5

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