Dielectric charging effects in floating electrode MEMS capacitive switches

被引：10
|
作者：
Michalas, L. [1 ]
Koutsoureli, M. [1 ]
Papandreou, E. [1 ]
Giacomozzi, F. [2 ]
Papaioannou, G. [1 ]
机构：
[1] Univ Athens, Dept Phys, Solid State Sect, GR-10680 Athens, Greece
[2] Fdn Bruno Kessler, Ctr Mat & Microsyst, Trento, Italy
来源：
MICROELECTRONICS RELIABILITY | 2015年 / 55卷 / 9-10期
关键词：
RF MEMS; Floating electrode; Dielectric charging; Reliability; CONTACTLESS; MODEL;
D O I：
10.1016/j.microrel.2015.07.024
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper presents a study oriented to the understanding of the floating electrode role on the charging characteristics of floating electrode RF MEMS capacitive switches. Identical devices with and without floating electrode have been stressed under induced charging mode. Biases of different levels and polarities were applied to the transmission line. Reduced and asymmetric, with respect to the bias polarity, charging effects were obtained on devices with floating electrode compared to the conventional ones. The results contribute towards the conclusion that the use of floating electrode in conjunction with the appropriate actuation polarity may reduce the charging effects and thus improving the device lifetime. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1891 / 1895
页数：5
相关论文
共 50 条
  • [1] Electrical Characteristics of Floating Electrode MEMS Capacitive Switches
    Michalas, L.
    Koutsoureli, M.
    Papandreou, E.
    Papaioannou, G. J.
    Giacomozzi, F.
    Colpo, S.
    Margesin, B.
    2012 7TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2012, : 36 - 39
  • [2] Modeling of dielectric charging in RF MEMS capacitive switches
    Sumant, Prasad S.
    CangellariS, Andreas C.
    Aluru, Narayana R.
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2007, 49 (12) : 3188 - 3192
  • [3] Characterization of dielectric charging in RF MEMS capacitive switches
    Herfst, R. W.
    Huizing, H. G. A.
    Steeneken, P. G.
    Schmitz, J.
    ICMTS 2006: PROCEEDINGS OF THE 2006 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, 2006, : 133 - +
  • [4] Acceleration of dielectric charging in RF MEMS capacitive switches
    Yuan, Xiaobin
    Peng, Zhen
    Hwang, James C. M.
    Forehand, David
    Goldsmith, Charles L.
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2006, 6 (04) : 556 - 563
  • [5] Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches
    Yuan, XB
    Hwang, JCM
    Forehand, D
    Goldsmith, CL
    2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4, 2005, : 753 - 756
  • [6] On the Modeling of Dielectric Charging in RF-MEMS Capacitive Switches
    Papaioannou, George
    Coccetti, Fabio
    Plana, Robert
    2010 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, 2010, : 108 - 111
  • [7] Impact of Humidity on Dielectric Charging in RF MEMS Capacitive Switches
    Peng, Zhen
    Palego, Cristiano
    Hwang, James C. M.
    Forehand, David I.
    Goldsmith, Charles L.
    Moody, Cody
    Malczewski, Andrew
    Pillans, Brandon W.
    Daigler, Richard
    Papapolymerou, John
    IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2009, 19 (05) : 299 - 301
  • [8] Dielectric Charging and Thermally Activated Processes in MEMS Capacitive Switches
    Papaioannou, George
    Tavasolian, Negar
    Goldsmith, Charles
    Papapolymerou, John
    2009 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, 2009, : 1752 - +
  • [9] Study of Residual Charging in Dielectric Less Capacitive MEMS Switches
    Mardivirin, D.
    Bouyge, D.
    Crunteanu, A.
    Pothier, A.
    Blondy, P.
    2008 IEEE MTT-S International Microwave Symposium Digest, Vols 1-4, 2008, : 33 - 36
  • [10] A Compact Model For Dielectric Charging in RF MEMS Capacitive Switches
    Sumant, Prasad S.
    Aluru, Narayana R.
    Cangellaris, Andreas C.
    INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2009, 19 (02) : 197 - 203
12345